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AsiaICMP ALF (Advanced Liquid Filtration)


  • AisaICMP ALF(Advanced Liquid Filtration) slurry filtration is one of the key parts for decreasing the level of defects caused by large slurry particles through CMP processing, and it is beneficial in contaminants controlling in chemical processes. It is easy and safe to use while minimized dead space design remains optimization throughout.
  • 1. Reduce personnel errors and engineering accidents
  • 2. Filter is easy to replace without additional tools
  • 3. One-piece design provides a uniform good density filter media designed. Prevent them from gathering into agglomerates during long time operating
  • 4. 70 percent space less compared with conventional layout