| - Poly/Oxide/STI/Cu/W
- Central Supply /Local Supply
- SDS Type : Buffer
- WET N2>=94%
- Slurry Character Monitor : PH/SG/Titrator/Concentration/Conductivity
- Safety : Barcode/Leakage/Pressure/Doorlock
- Pipping Pressure CLC Control
- Auto Function : Auto Dilute/Tank Clean/Pipe Clean/Filter Clean
- Mixing Precision:±10 g
- Redundant Function:(Pump/Tank/Filter/Unit)
- Monitor System : SCADA
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