Slurry Delivery System｜Customized
Slurry Delivery System Total Solution
| Product NO. | SDS Customized-Total Solu |
| - AsiaICMP Slurry Dispense system (SDS) with blend and/or supply capability, developed for advanced Chemical Mechanical Polishing/Planarization (CMP) processes, offers the first high-quality with cost-effective management solution to meet the slurry and chemistry mixing and delivery needs. Reducing system complexity, capital cost, and maintenance requirements.
- Customized with modulated design for challenging CMP applications:
- 1. Complete mixing strategy to use various slurry blending conditions
- 2. Avoid sedimentation, keep slurries in good suspension
- 3. Standard, aggressive and jet-mixing stirs, minimizing detriment of particle-sensitive slurry
- 4. Precise and programmable mixing strategy
- 5. Modular in functions, structures, and metrology tools
- 6. Less pH shock/ slurry settlement
- 7. Improved flow-loop design for multi-process needs
- 8. Effective double-filter module
- 9. Complete Inline flushing capability
- 10. Improved double-buffered tanks, supply flow loop and triple tank mixing supply combined function SDS offer due loops supply system design
- 11. Open drum/ regular drum/ tote raw materials
- 12. Tank sizes and materials can be customized (for 60,120,250,500 & 1000L disk, corn type)
- 13. Modular in functions, structures, and optional modules
- *Redundant System: if one fails, the standby one will immediately take control and distribute slurry to the global loop.
- *Optional Metrology/Control alternatives
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